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Contamination-Free Manufacturing for Semiconductors and Other Precision Products
ContaminationFree Manufacturing for Semiconductors and Other Precision Products
Author: Donovan
Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus...  more »
ISBN-13: 9780824703806
ISBN-10: 0824703804
Publication Date: 3/14/2001
Pages: 460
Edition: 1
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Publisher: CRC
Book Type: Hardcover
Members Wishing: 0
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