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Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology Series)
Handbook of VLSI Microlithography Principles Technology and Applications - Materials Science and Process Technology Series
This handbook presents the principles, technology and applications of VLSI microlithography. It covers optical lithography, electron-beam, ion-beam, and X-ray lithography as applied to the manufacture of routine and research level VLSI devices. The book provides a more complete view of lithographic tool methods than has been presented previously.
ISBN-13: 9780815512813
ISBN-10: 0815512813
Publication Date: 2/1/1992
Pages: 649
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Publisher: Noyes Publications
Book Type: Hardcover
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