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High k Gate Dielectrics (Materials Science and Engineering)
High k Gate Dielectrics - Materials Science and Engineering
The drive towards smaller and smaller electronic componentry of microelectronics is demanding new materials with higher electrical permittivity. An impressive collection of methods with in-depth coverage, this book reviews the state-of-the-art in high permittivity gate dielectric research. Leading researchers from Europe and the USA describe var...  more »
ISBN-13: 9780750309066
ISBN-10: 0750309067
Publication Date: 12/1/2003
Pages: 614
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Publisher: Taylor & Francis
Book Type: Hardcover
Members Wishing: 0
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