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High-Resolution X-Ray Scattering: From Thin Films to Lateral Nanostructures (Advanced Texts in Physics)
HighResolution XRay Scattering From Thin Films to Lateral Nanostructures - Advanced Texts in Physics
Author: Ullrich Pietsch, Vaclav Holy, Tilo Baumbach
The book presents a detailed description of high-resolution x-ray scattering methods suitable for the investigation of the real structure of single-crystalline layers and multilayers, including structure defects in the layers and at the interfaces. Particular attention is devoted to lateral structures in semiconductors and semiconductor multilay...  more »
ISBN-13: 9781441923073
ISBN-10: 1441923071
Publication Date: 7/31/2012
Pages: 424
Edition: 2nd ed. 2004
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Publisher: Springer
Book Type: Paperback
Other Versions: Hardcover
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