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Low Temperature Plasma Physics: Fundamental Aspects and Applications
Low Temperature Plasma Physics Fundamental Aspects and Applications
Low-temperature plasma physics is a very active area of research located on the boundaries between physics, chemistry and materials science. Recent technological developments, e.g. in plasma etching or plasma deposition, have led to a revived interest in plasma physics and technology. — This volume describes in detail fundamentals and application...  more »
ISBN-13: 9783527288878
ISBN-10: 3527288872
Publication Date: 2/15/2001
Pages: 523
Edition: 1st
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Publisher: Wiley-VCH
Book Type: Hardcover
Members Wishing: 0
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