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Microlithography: Science and Technology, Second Edition (Opitcal Science and Engineering)
Microlithography Science and Technology Second Edition - Opitcal Science and Engineering
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial labo...  more »
ISBN-13: 9780824790240
ISBN-10: 0824790243
Publication Date: 5/11/2007
Pages: 864
Edition: 2
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Publisher: CRC Press
Book Type: Hardcover
Members Wishing: 0
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