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Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)
Principles of Lithography Second Edition - SPIE Press Monograph Vol. PM146
Author: Harry J. Levinson
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several sub...  more »
ISBN-13: 9780819456601
ISBN-10: 0819456608
Publication Date: 2/2005
Pages: 438
Edition: 2nd
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Publisher: SPIE--the International Society for Optical Engineering
Book Type: Hardcover
Members Wishing: 0
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